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擺鏡平臺

產(chǎn)品詳情
產(chǎn)品參數(shù)

Mechanical Properties
blocking torque MB

2.1 Ncm
max. normal force FN

1.5 N
max. radial force FXY

2.5 N
positioner dimension

Ø 50 mm x 35 mm
weight

≈ 120 g
 
Closed-Loop with Nanosensor (-S)
sensor resolution

0.1 μrad / 1 nm
closed-loop resolution

0.2 μrad / 2 nm
 
Materials and Vacuum Options 1
-HV (10-6 mbar), -UHV / -UHVT (10-11 mbar)
Positioning
travel

± 25 °
10 mm
step width

6 – 150 μrad
50 – 1300 nm
scan range

140 μrad
1.3 μm
scan resolution

< 0.1 μrad
< 1 nm
velocity

30 °/s
10 mm/s