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單軸平臺(tái)

產(chǎn)品詳情
產(chǎn)品參數(shù)

Mechanical Properties
blocking force FB

> 3.5 N
max. normal force FN

20 N
max. lift force FL

> 1.5 N
positioner dimension

22 x 17 x 8.5 mm3
weight

13 g
pitch torque MP

0.6 Nm
yaw torque MY

0.6 Nm
roll torque MR

0.4 Nm

Positioning
travel

± 6 (12) mm
step width

1 – 1,500 nm 1
scan range

> 1.5 µm
scan resolution

< 1 nm
velocity

> 20 mm/s
max. frequency

18.5 kHz

Closed-Loop with -L 
sensor resolution

4 nm
closed loop resolution

± 500 nm (H)CU
4 nm MCS
repeatability

± 1 µm (H)CU
± 50 nm MCS