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單軸平臺(tái)

產(chǎn)品詳情
產(chǎn)品參數(shù)

 
Mechanical Properties
blocking force FB

> 3.5 N
max. normal force FN

30 N
max. lift force FL

> 1.5 N
positioner dimension

60 x 17 x 8.5 mm3
weight

38 g
pitch torque MP

7.6 Nm
yaw torque MY

7.6 Nm
roll torque MR

1.4 Nm
Positioning
travel

± 20.50 (41) mm
step width

1 – 1,500 nm 1
scan range

> 1.5 µm
scan resolution

< 1 nm
velocity

> 20 mm/s
max. frequency

18.5 kHz
 
Closed-Loop with -S
sensor resolution

1 nm
repeatability

± 60 nm 2