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單軸平臺

產(chǎn)品詳情
產(chǎn)品參數(shù)

Mechanical Properties
blocking force FB

> 3 N

max. normal force FN

30 N

max. lift force FL

> 1 N

carriage dimension

33.8 x 27 x 13 mm3

weight of carriage

44 g

weight of rail

59 g / 100 mm

pitch torque MP

6 Nm

yaw torque MY

6 Nm

roll torque MR

11 Nm

Positioning
rail length

70 .. 475 mm

step width

1 – 1,500 nm 1

scan range

> 1.5 µm

scan resolution

< 1 nm

velocity

> 20 mm/s

max. frequency

18.5 kHz

 

Closed-Loop with -S

sensor resolution

1 nm

repeatability

± 70 .. 450 nm 2