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六軸壓電平臺(tái)

產(chǎn)品詳情
產(chǎn)品參數(shù)

Mechanical Properties
max. vertical load FV

2.5 N
max. horizontal force FH

1.25 N
positioner dimension

115 x 101.4 x 25 mm3
weight

≈ 400 g













Travel Ranges
x

11 mm
y

11 mm
z

5 mm

Θx

18 °
Θy

20 °
Θz

37 °










Closed-Loop with Nanosensor (-S)
smallest increment (x,y,z)

1 nm
smallest increment (Θx,y,z)

1 µrad
repeatability for full travel range 1 (x,y,z)

± 200 nm
repeatability for full travel range 1 (Θx,y,z)

± 10 µrad
repeatability for 1 mm travel range 1 (x,y,z)

± 15 nm