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{dede:field name='position'/}
 

六軸壓電平臺

產(chǎn)品詳情
產(chǎn)品參數(shù)

Mechanical Properties 1
max. vertical load FV

5 N
max. horizontal force FH

2.5 N
positioner dimension

> 110 x 80 x 67 mm3
weight

≈ 200 .. 1000 g

Travel Ranges
x

48 mm
y

28 .. 48 mm
z

≤ 9 mm

Θx

≤ 28 °
Θy

≤ 26 °
Θz

≤ 20 °
 
Closed-Loop with Nanosensor (-S)
smallest increment (x,y,z)

1 nm
smallest increment (Θx,y,z)

1 µrad
repeatability for full travel range 2 (x,y,z)

± 200 nm
repeatability for full travel range 2 (Θx,y,z)

± 10 µrad
repeatability for 1 mm travel range 2 (x,y,z)

± 15 nm