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{dede:field name='position'/}
 

六軸壓電平臺

產品詳情
產品參數

Mechanical Properties
max. vertical load FV

20 N
positioner dimension

420 x 430 x 93 mm3
weight

≈ 11 kg

Travel Ranges
x

200 mm
y

200 mm
z

10 mm

Θx

6 °
Θy

7 °
Θz

24 °
 
Closed-Loop with Nanosensor (-S)
smallest increment (x,y,z)

1 nm
smallest increment (Θx,y,z)

1 µrad
repeatability for full travel range 1 (x,y,z)

± 200 nm
repeatability for full travel range 1 (Θx,y,z)

± 10 µrad
repeatability for 1 mm travel range 1 (x,y,z)

± 15 nm