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單軸平臺

產(chǎn)品詳情
NPZ25-206是一款閉環(huán)單軸納米Z向定位臺，25μm行程。響應(yīng)速度極快，自振頻率達3kHz。完全滿足大部分SPM的應(yīng)用。采用銦鋼材料制作，熱穩(wěn)定性極高。
產(chǎn)品參數(shù)

Part Number 3715206
Footprint 44mm H x 20mm ∅
Material Super Invar
Maximum Load 1kg
Max Force (Push/Pull) 100N/20N
Stage Mass 90g
Nanomotion Control Z
Closed-loop Travel 25µm
Open-loop Travel (-30 to 150 V) 40µm
Position Noise 0.1nm
Stiffness 20.0N/µm
Resonant Frequency 4000Hz
Settling Time 2ms
Linearity Deviation 0.01%
Capacitance 1.6µF
Integrated Sensor Capacitive
Cable Length 2m
Controller LC.400