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兩軸平臺(tái)

產(chǎn)品詳情
NPXY100-126是一款重載超薄大開(kāi)孔XY掃描臺(tái)，最大承載5kg，通孔尺寸68mm×68mm，厚度僅為17mm。適用于納米加工、納米壓印、光學(xué)測(cè)量、存儲(chǔ)科學(xué)、材料科學(xué)等應(yīng)用。
產(chǎn)品參數(shù)

Part Number 3715126
Footprint 140mm W x 140mm D x 17mm H
Diameter NA
Aperture 68mm W x 68 mm D
Material Aluminum
Maximum Load 5kg
Max Force (Push/Pull) 100N/20N
Stage Mass 550g
Nanomotion Control XY
Closed-loop Travel 100µm|100µm
Open-loop Travel (-30 to 150 V) 160µm|160µm
Position Noise 0.3nm|0.3nm
Stiffness 3.3N/µm|3.3N/µm
Resonant Frequency 850Hz|850Hz
Settling Time 5ms|5ms
Linearity Deviation 0.01%|0.01%
Capacitance 4.8µF|4.8µF
Integrated Sensor Capacitive
Cable Length 2m
Controller LC.402