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兩軸平臺

產(chǎn)品詳情
NPXY200-401是一款重載大行程XY掃描臺，最大承載5kg，行程200μm×200μm，通孔尺寸68mm×68mm，而厚度僅為17mm。適用于納米加工、納米壓印、光學測量、存儲科學、材料科學等應用。
產(chǎn)品參數(shù)

Part Number 3715401
Footprint 140mm W x 140mm D x 17mm H
Diameter NA
Aperture 68mm W x 68 mm D
Material Aluminum
Maximum Load 5kg
Max Force (Push/Pull) 100N/20N
Stage Mass 570g
Nanomotion Control XY
Closed-loop Travel 200µm|200µm
Open-loop Travel (-30 to 150 V) 250µm|250µm
Position Noise 0.7nm|0.7nm
Stiffness 2.1N/µm|2.1N/µm
Resonant Frequency 700Hz|700Hz
Settling Time 8ms|8ms
Linearity Deviation 0.01%|0.01%
Capacitance 7.5µF|7.5µF
Integrated Sensor Capacitive
Cable Length 2m
Controller LC.402